pţ
MEGATERM_MegaPositionerFilesEN.zipt@C𓀂A𓀂tH_ɓĂȉ3̃t@C
(MEGATERM.init@CAM-EDC-PSF5.mtut@CAM-EDC-PSF6.mtut@C)
K^[CXg[ĂfBNgɏ㏑ĂD

ˁuEnglish Versionv
1.Decompression@"MEGATERM_MegaPositionerFilesEN.zip"
2.You get 3 files by decompression.
@EMEGATERM.ini          :file
@EM-EDC-PSF5.mtu        :file
@EM-EDC-PSF6.mtu        :file
3. Overwrite to directory in MEGATERM.


{ţ
MEGATERM_MegaPositionerFilesJP.zipt@C𓀂A𓀂tH_ɓĂȉ3̃t@C
(MEGATERM.init@CAM-EDC-PSF5.mtut@CAM-EDC-PSF6.mtut@C)
K^[CXg[ĂfBNgɏ㏑ĂD

ˁuJapanese Versionv
1.Decompression@"MEGATERM_MegaPositionerFilesJP.zip"
2.You get 3 files by decompression.
@EMEGATERM.ini          :file
@EM-EDC-PSF5.mtu        :file
@EM-EDC-PSF6.mtu        :file
3. Overwrite to directory in MEGATERM.